Substrate Surface Preparation Handbook

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Covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits, this title offers engineers detailed guidance in the entire substrate surface preparation process, from lapping and polishing… to specialized techniques and surface finishing.

SKU: 9781608072132
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Weight 1 kg
Edition

1st

Format

Hardback

ISBN

9781608072132

Language

English

Pages

195

Publication Year

Publisher

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